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What is the mass production accuracy achieved by China's LDI lithography machine?
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What is the mass production accuracy achieved by China's LDI lithography machine?

What is the mass production accuracy achieved by China's LDI lithography machine?

July 04, 2023

At present, the mass production accuracy (line width) achieved by the domestic LDI lithography machine, the optical maskless is currently understood at 1UM+.

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